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UV LED ?

UV LED 100 ũ β GaN Ĩ Ų Ĩ ij¡Ͽ ý۰ 濭 شȭ uv ledĨ ̴. ΰǸ 1-8% uv Ǹ, 80% ̻ ȴ.

1), LED
.1962 GE GaAsP ̿ LED ߸, 1968 .
. 1980뿡 AlGaAs ̿ ֵ LED ߵǸ鼭 sign, signal, display о߷ DZ ۵.
, 1 9 9 2 InGaAlP ̿ ʰֵ LED ߵǸ鼭 ȣ, ڵ ȰDZ .

. ȭ ݵü 1986 Ϻ īŰ AlN ̿Ͽ ǰ GaN Mg LEEBI (low-energy electron beam irradiation) ó ̿Ͽ 21 01 6c m- 3
󵵸 1991⿡ p-n ս GaN LED .
. 1993⿡ ġ ī ڻ簡 ¿ GaN ۸ Ͽ
ȭ ڸ Ͽ, InGaN/GaN ߾ 칰 Ȱ ֵ û LED ߵ.
. 2000 InGaAlP LED ȿ 100 lm/W ϸ鼭 (80 lm/W) ɰϴ ȿ .
- 2000 ķ RGB L E D ȿ ӵ ϸ鼭 ޴ ܸ LCD Ʈ, ڵ, , Ư о о



LED


LED 迭


2). UV LED Ư¡

  - 0 .3 mm ~ 2 mm Ĩ ϰ ⼺ ̹Ƿ ǰ ȭ
- ʳ( ~ 1 0- 8) ӵ Ƿ on-off Ī ſ
   
- ʱ 50% ҽ Ϲ ǿ GaN 迭 LED 10
   ð, GaAs LED 100 ð .
- Ʈ Ƿ Ӻ ϴ
- Ĩ Ǵ Ĩ µ ſ ΰϴ.

µ 庯ȭ ȭ ū UV LED ȭ⿡ ſ ū ɸ̸, ̸ ذϴ led ū ǥ̴.




3). ȿ UV LED Ʈ
( κ LED Ű¡ LED ȿ ̰ 꼺 ø õ ڷ̹Ƿ LED Ĩ Ͼ ƴ϶ ʿ )

.
LED ǿ GaN LED Sapphire, SiC, GaN, Si Ǹ, ܰ ַ Sapphire ϸ Cree SiC ϱ⵵ .( InGaAlP AlGaAs 迭 LED GaAs ).
GaN ں ̾  ̰ ..
Si ϰ ϱ ȭ ϸ ⿡ Ͽ õϰ ں ũ Sapphire soft ̱  ư ٴ ִ.

. ý (Epitaxy)
LED ⺻ 屸

  - LED MOCVD (metal organic chemical vapor deposition) Ű
   50 um̻ ĸ (thick film) HVPE(hydride vapor phase epitaxy) Ų.
- GaAs ̿ InGaAlP LED ̹Ƿ ȵ
   Sapphire ǰ ȭ յ ſ ũǷ ٺ Ծ
    Ұϴ.
- ȭ LED (dislocation) ּȭϰ ĸ ϱ
    ⺻ ϴ μ, 500 α ¿ AlGaN
   (0¡1) (nucleation layer) 20-30 nm µ ÷
   ܰȭ Ű ϰ ִ.
- n -, Ȱ, p- Ű p -ذ
    ߱ p - 󵵷 ε p+ Ŵ. ϼ LED ⺻ DZ
   Ʒ ׸ .
- Ȱδ ȿ ̱ ߾ 칰 (Multi quantum well,
   MQW) ϴµ ϴ 칰 庮 β Ѵ.


[ ȭ LED ⺻ ]

  - δ n- Si Ǹ p- InGaAl P ῡ
   Zn, ȭ迡 Mg Ǵµ M g Ȱȭ ġ ʾ p
   .
- ̴ Ұ Mg Ͽ Mg-H ü ϸ
    compensation DZ ε Mg-H ֱ ī
   Ű LEEBI ó õƾ Ŀ ī ڻ翡 õ ó
    ε ȿ .
- AlGaN/GaN 迭 ǰ ū ںյ ̿ܿ â ũǷ
   Al β ڸ crack ߻ Ƿ Ӱβ ʰ
    ̿ Ȱ ʿ.

. GaInN (epitaxy layer)

  - GaInN 0.7 eV (1771 nm) ſ .
- ̴ InXG a1 - XN ( 0¡1 ) ܼ ڿܼ ϴ
   ǹϸ GaInN ϴٸ, ȭ ݵü UV LED
- ׷ Ga N In ų, InN Ga и
   ϸ ̸ µ ̰ Ǹ In dissociation ܼ ϱ
   .

. (Quantum dot)

  - GaN/AlN ̵ ڻ ̴ 3% μ ׵ III-V ȭչݵü
    ڻ ̿ ϱ ׷쿡 ǰ
- InGaN ȿ⺸ٴ InGaN ü и In
   ұϼ carrier localization ߱ȿ Ѵٴ ˷.
- ũ⸦ Ͽ ߱  ϹǷ RGB ߱ϴ
   ߱ Ͽ .

. ý

  - Epitaxial lateral overgrowth (ELO) 1980 ߹ integrated circuits (IC)
   Si ELO ۵.
- 1 9 8 0 Ĺݺ opto-electric integrated circuits (OEIC) LPE, MOCVD,
   MBE ̿ GaAs, GaP, InP ELO ߴϿ, 1990 Ĺ LED
   , LD , MOCVD, HVPE ̿ G a N ELO
    ߵ.
- ȭݵü 1997 GaN/SiC ó
- GaN ڸ sapphire, Si, SiC ũ
   Ͽ , ϰ, threading dislocation
   (TD) bendingǰų mask ܵν ǥ ħ .
- ̷ Ư ̿Ͽ, SiO2 PECVD mask patterningϰ GaN
   MOCVD ϸ window (Ȥ seed )κ Ǵ GaN SiO2 mask
    鼺ϰ SiO2 mask GaN ʴ ǰ
   .

  - wing TD density 뷫 ~ 106 cm- 2 window κп
   10,000 . Ͽ ӵ ӵ 2 ̻
   ų . 1997 ī ڻ翡 ELO GaN InGaN-based short-
   wavelength
   LD ۵ν GaN ELO LD ȿ .
- Pendeo-Epitaxy (PE), Cantilever Epitaxy (CE), Lateral Epitaxy on Patterned Sapphire
   (LEPS) Ͽ TD ǥħ Ű ELO
    ͵.
- Pendeo epitaxy maskless ELO Ҹ, 2001R.F.Davis ׷쿡 ó
   
- GaN Sapphire , DZ ǽ İϿ patterningϰ
    ٽ GaN ϸ, ʰ GaN 켼ϰ
   . Ͽ ӵ ӵ 2 ̻ ų
   , SiO2 mask ʴ Ư¡ .
- FIELO (Facet-initiated ELO) 1997 Usui  ߵ HVPE ̿
    μ, ELO GaN<1-100> SiO2 mask ä. Ͽ
   ó facet HVPE ̿Ͽ GaN β Ͽ ǥ ȰѴ



Pendeo Epitaxy

  - κ mask κ window TD
   density ҽų ִ .
- FACELO (Facet-controlled ELO) 2000 Ϻ Mie Hiramatsu Sumitomo
   Corporation ߵ ̸, MOCVD ٸ ǿ 2-step ELO
   ϴ
- ELO GaN<1-100> SiO2 mask , (Ȥ
   ) Ͽ facet ȰȭŲ , (Ȥ ) ٸ facet Ȱȭ
    ǥ źȭŰ . FIELO HVPE ̿Ͽ β GaN β
   ϴ ǥ źȭϿ FACELO MOCVD ٸ Ͽ
    GaN ڸ źȭŲٴ ٸ.
- Hiramatsu FACELO ̿Ͽ GaN ڸ TD density 106 cm2
    ְ, ũ GaN <0001> tilt undoped GaN tilt ִ
   
- University of California at Santa Barbara DenBaars ׷쿡 2 0 0 1 ELO
    Ǿ ߵ cantilever epitaxy (CE) ̿Ͽ SiC ǰ Si
   GaN ڸ ,
- CE ELO ٸ ϰ GaN seed ʴ´ٴ .
    SiC̳ Si stripe m Ī stripe
   top plane GaN trench Ű .
    stripe top plane GaN ڸ trench GaN Ǵµ
   trench GaN stripe ̱ ϱ stripe top plane
   GaN 忡 .
- Katona Si ǰ SiC CE GaN Ͽ AFM image Ÿ dartk
   pit density stripe ltrench CE GaN/SiC 9108cm2
   Ͽ, CE GaN/Si(111) 7.5109 cm2, wing dark pit
    ʾҴٰ
.
- TD ħ dielectric mask 0.8
   wing tilt ȴٰ .

 

. Ĩ (Fabrication)

  - LED Ĩ ϱ ؼ 뱤(photolithography), İ(etching), ݼ
    (metallization), Passivation, lapping/polishing 0.30.3
   0.1mm Ĩ иǴµ ȿ ũ Ҽ
- GaAs ϴ InGaAlP LED ̹Ƿ top-bottom ·
    Sapphire ϴ , ü̹Ƿ ϱ
   n - GaN Ϻ İ(mesa etching)Ͽ top-top ġ.
- p - p 帧 Ȱϰ ϱ Ͽ رݼӰ
   p - ̿ 5 - 7nm β ݼӸ Ȱ.
- ֱٿ ݼ ش ݼ ȭ ̿ Ͽ
   90% ̻ ۵ ȴٴ .

. øĨ(flip chip)

  - ȿ(extraction efficiency) 캸, ߱ڴ ǹ
    ߱ ݼ̳ е(bonding pad), ο
   Ǿ ս ŭ.
- , ߱ڸ ؼ ũⰡ Ŀ ,
    Ŀ p -GaN ʾƼ ü ߱
   ⿩ ϰ ǹǷ ũ⿡ Ѱ谡 . , L E D ϱ ؼ
    ߱ ȿ, ũ, ٰ ؾ .
- ̷ Ͽ øĨ(flip-chip) ߱ڰ . øĨ ̿ ߱
   ڴ Sapphire
- øĨ Ŀ S a p p h i r e ν ݼ ˺γ е,
    ο ս ִ . β p - metal Ͽ
    Ǿ ϰ, p-GaN ݻ ݼ
   ν S a p p h i r e κ ݻ ȿ Ŵ.
- ߱ Ŀ ߻.
    ߱ 200/W .
- øĨ β p ݼ ̿ϴµ ߻ Ȱκ pݼӱ
   Ÿ Ƿ 濭 ϰ 濭Ḧ ̿Ͽ ũ ҽų
   . 8/W (Lumileds Luxeon ) .
- Solder ball ߿Ͽ solder ball , ϼ,
   ɰ 꼺 ¿ϴ Ұ .



. ȿ
- Ĩ ο ߻ ڴ Կ ȯDZ⵵ ϰ ݻ(internal total reflection) ȿ travelling ϴٰ ҸǴ ս ũ Ͽ ̸ ּȭ ʿ䰡 .
- ݻ Ĩ л ü Ĩ Ĩ ܺȯ ̰ Ĩ ܺθ 鿡 ݻ簡 µ Ư ݻ簢 ̻󿡼 100% ݻǴ .
- ̷ Ϲ LED ȿ غ 10% Ұϸ ̸ ø ū ̴.


- ǥ鿡 ݻ縦 ̴ δ ǥ鿡 ڰ ϰ scattering ǵ ǥ ϴ (fixture), Ĩ Ƕ̵ ϴ (TIP, truncated inverted pyramid Ǵ ATON øĨ NOTA) ֱٿ Ư ڸ Ǵ ݻŰ LED ǥ鿡 ڰ (photonic crystal) ʹϴ õǰ .
-  ݼӱ ϴ ( Thin GaN) ȿ 72% .
- Ĩ 11mm ̻ Ĩ ϸ Ĩ ũⰡ ϸ ذ Ÿ ־鼭 p - Ȯ Ƿ ġ Ʒ ׸ó پϰ 迭 (finger cell Ǵ multi parallel cell ) .


. Ű¡(Packaging)
Ĩ ̳ ýۿ ϵ Ű ģ, Ű Ĩ ܺηκ ȯ, , ȭ, ȣ ִ Ӹ ƴ϶, ȿ , Űüμ ҵ ſ ߿ϴ.
ǰ پϰ ǥر԰ ſ Ű ° ǥ , SMD(surface mount device), COB(chip on board), BLU(backlight
unit) ִ.
Ű ǰ ʹȭ(side view BLU), ȭ(top view BLU), ȭ() ǰ ִ(ġ Ű ε) .
Ű Ǿ mount , , ڿܼ ̸ LED ̷ ɰ.
Lumileds 1-5 W LED ̷ ִ ǰ̴.